高功率脉冲磁控溅射Ti-B-N涂层沉积温度对其结构及性能的影响
刘艳梅, 许梦娇, 赵佳寅, 叶佳妮, 郭玉垚, 范其香, 曹凤婷, 王铁钢
Influence of Deposition Temperature on the Microstructure and Properties of High Power Impulse Magnetron Sputtered Ti-B-N Coatings
LIU Yanmei, XU Mengjiao, ZHAO Jiayin, YE Jiani, GUO Yuyao, FAN Qixiang, CAO Fengting, WANG Tiegang
中国表面工程
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2026, (2): 475
-484
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DOI: 10.11933/CSE2026054
