离子源辅助HiPIMS反应溅射快速沉积Al2O3薄膜
杨东杰, 安小凯, 刘瑶瑶, 吕伟, 罗万里, 于钦芳, 吴敏, 崔岁寒, 刘亮亮, 吴忠振
Rapid Deposition of Al2O3 Films by HiPIMS Assisted by Ion Source
YANG Dongjie, AN Xiaokai, LIU Yaoyao, LÜ Wei, LUO Wanli, YU Qinfang, WU Min, CUI Suihan, LIU Liangliang, WU Zhongzhen
中国表面工程
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2026, (2): 365
-373
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DOI: 10.11933/CSE2026057
