基于Cu3Se2固体电解质的离子束沉积金属薄膜及工艺优化应用
吐沙姑·阿不都吾甫, 舒凤远, 付德君
Application Research on Ion Beam Deposition of Metal Films Based on Cu3Se2 Solid Electrolytes and Process Optimization
ABUDOUWUFU Tushagu, SHU Fengyuan, FU Dejun
中国表面工程
.
2026, (1): 472
-481
.
DOI: 10.11933/CSE2026036
