(HfMoNbZr)1-xNx薄膜晶体结构和力学性能的氮含量调控
万剑桥, 施杰, 胡恒宁, 邹嘉力, 王宇, 陈乙, 唐正强, 杜昊
Tuning Crystallographic Structure and Properties of (HfMoNbZr)1-xNx Films by Nitrogen Concentration
WAN Jianqiao, SHI Jie, HU Hengning, ZOU Jiali, WANG Yu, CHEN Yi, TANG Zhengqiang, DU Hao
中国表面工程
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2026, (1): 459
-471
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DOI: 10.11933/CSE2026035
