脉冲占空比对dcMS/HiPIMS复合沉积TiAlTaN涂层力学及耐磨性能的影响
牛晓燕, 刘明泽, 牛彬彬, 马庆岩, 王玉江
Effect of Pulse Duty Cycle on the Mechanical and Tribological Properties of TiAlTaN Coatings Deposited by Hybird dcMS/HiPIMS Sputtering
NIU Xiaoyan, LIU Mingze, NIU Binbin, MA Qingyan, WANG Yujiang
中国表面工程
.
2026, (1): 84
-95
.
DOI: 10.11933/CSE2026009
