氮气流率对Ta-Hf-W-N多主元合金氮化物薄膜力学性能和摩擦磨损性能的影响
宋铭宇, 井致远, 徐志刚, 张志彬, 袁海超, 胡振峰, 梁秀兵
Effect of Nitrogen Gas Flow Rate on the Mechanical and Tribological Properties of Ta-Hf-W-N Multi-principal Element Alloy Nitride Films
SONG Mingyu, JING Zhiyuan, XU Zhigang, ZHANG Zhibin, YUAN Haichao, HU Zhenfeng, LIANG Xiubing
中国表面工程
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2026, (1): 61
-73
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DOI: 10.11933/CSE2026007
