HiPIMS频率对弧辉复合沉积TiZrN/TiN纳米多层膜微观结构和性能的影响
魏永强, 张晓晓, 张华森, 顾艳阳, 杨佳乐, 蒋志强, 韦春贝, 钟素娟
Effects of HiPIMS Frequency on the Microstructure and Properties of TiZrN / TiN Nano-multilayer Film Deposited by a Hybrid Deposition Technique Combining AIP and HiPIMS
WEI Yongqiang, ZHANG Xiaoxiao, ZHANG Huasen, GU Yanyang, YANG Jiale, JIANG Zhiqiang, WEI Chunbei, ZHONG Sujuan
中国表面工程
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2025, (5): 312
-325
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DOI: 10.11933/j.issn.1007-9289.20240326005
