修整辅助液对固结磨料化学机械抛光单晶SiC材料去除稳定性的影响
吴鹏飞, 刘宁, 贺雷, 朱楠楠, 朱永伟
Effect of Conditioning Slurry on Material Removal Stability in Fixed- abrasive Chemical Mechanical Polishing of Single-crystal SiC
WU Pengfei, LIU Ning, HE Lei, ZHU Nannan, ZHU Yongwei
中国表面工程
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2025, (5): 301
-311
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DOI: 10.11933/j.issn.1007-9289.20240417002
