晶圆减薄机用多孔质推力轴承静态特性研究
石明辉, 张国龙, 杜鹏, 陈江义, 胡洪洋
Research on Static Characteristics of Porous Thrust Bearings for Wafer Grinding Machines
SHI Minghui, ZHANG Guolong, DU Peng, CHEN Jiangyi, HU Hongyang
中国表面工程
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2025, (5): 157
-170
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DOI: 10.11933/j.issn.1007-9289.20250324002
