不同粒径氧化铈磨料对K9玻璃化学机械平坦化性能的影响
姜峰, 钱善华, 屈克松, 卞达, 倪自丰
Effect of Cerium Oxide Abrasives with Different Particle Sizes on the Chemical Mechanical Planarization Performance of K9 Glass
JIANG Feng, QIAN Shanhua, QU Kesong, BIAN Da, NI Zifeng
中国表面工程
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2025, (5): 107
-118
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DOI: 10.11933/j.issn.1007-9289.20241226002
