砷化镓化学机械抛光中的摩擦化学去除机理研究
高健, 任兴云, 梁德旭, 张宏林, 周怀诚, 江亮, 余丙军, 钱林茂
Research on Tribochemical Mechanism in Chemical Mechanical Polishing of GaAs
GAO Jian, REN Xingyun, LIANG Dexu, ZHANG Honglin, ZHOU Huaicheng, JIANG Liang, YU Bingjun, QIAN Linmao
中国表面工程
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2025, (5): 99
-106
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DOI: 10.11933/j.issn.1007-9289.20241229001
