单晶金刚石表面平坦化技术的发展与挑战
杨阔, 柴智敏, 戴媛静, 刘宇宏, 路新春
Development and Challenges of Surface Planarization Technology for Single Crystalline Diamond
YANG Kuo, CHAI Zhimin, DAI Yuanjing, LIU Yuhong, LU Xinchun
中国表面工程
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2025, (5): 1
-33
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DOI: 10.11933/j.issn.1007-9289.20250415001
