Invar 36表面脉冲直流磁控溅射制备AlN薄膜的择优取向调控及性能
吴熠, 唐国梁, 李文举, 肖舒
Preferred Orientation Tuning and Performance of AlN Films Prepared by Pulsed DC Magnetron Sputtering on Invar 36 Surfaces
WU Yi, TANG Guoliang, LI Wenju, XIAO Shu
中国表面工程
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2025, (4): 233
-243
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DOI: 10.11933/j.issn.1007-9289.20231129001
