氮化物中间层对碳薄膜结构及摩擦学性能影响研究
赵燕春, 何瑞芳, 高凯雄, 张斌, 王欣, 许春玲
Study on the Effect of Nitride Interlayer on the Structure and Tribological Properties of Carbon Films
ZHAO Yanchun, HE Ruifang, GAO Kaixiong, ZHANG Bin, WANG Xin, XU Chunling
中国表面工程
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2025, (4): 208
-220
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DOI: 10.11933/j.issn.1007-9289.20240422001
