同步脉冲偏压对HiPIMS制备DLC薄膜结构和性能的影响
李琪刚, 陈仁德, 李昊, 王振玉, 郭鹏, 崔丽, 王梁, 汪爱英
Effect of Synchronous Pulsed-bias on Structure and Mechanical Properties of DLC Films by HiPIMS Technique
LI Qigang, CHEN Rende, LI Hao, WANG Zhenyu, GUO Peng, CUI Li, WANG Liang, WANG Aiying
中国表面工程
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2025, (2): 233
-244
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DOI: 10.11933/j.issn.1007-9289.20231126001
