N含量对多组元ZrNbMoTaW薄膜结构和力学性能的影响
代其杨, 许雨翔, 代伟, 王启民
Effect of N Content on the Structure and Mechanical Properties of Multicomponent ZrNbMoTaW Thin Films
DAI Qiyang, XU Yuxiang, DAI Wei, WANG Qimin
中国表面工程
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2025, (2): 80
-89
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DOI: 10.11933/j.issn.1007-9289.20250103002