外加辅助阳极的高功率脉冲磁控溅射管内Cr涂层制备及其性能分析
王子嘉, 李宇鑫, 胡天时, 田修波, 巩春志, 张辉
Preparation and Surface Properties of Cr Coatings in High-power Pulsed Magnetron Sputtering Tubes with External Auxiliary Anode
WANG Zijia, LI Yuxin, HU Tianshi, TIAN Xiubo, GONG Chunzhi, ZHANG Hui
中国表面工程 . 2025, (1): 99 -106 .  DOI: 10.11933/j.issn.1007-9289.20240109001