脉冲偏压占空比对TiCrN薄膜微观结构和性能的影响规律*
魏永强, 顾艳阳, 范梦圆, 杨佳乐, 张华森, 张晓晓, 钟素娟, 廖志谦
Effects of Pulsed Bias Duty Cycle on the Microstructure and Properties of TiCrN Films
WEI Yongqiang, GU Yanyang, FAN Mengyuan, YANG Jiale, ZHANG Huasen, ZHANG Xiaoxiao, ZHONG Sujuan, LIAO Zhiqian
中国表面工程
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2023, (6): 57
-67
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DOI: 10.11933/j.issn.1007-9289.20221230001
