等离子体增强磁控溅射TiN涂层与铝对摩时的摩擦磨损行为∗
谢启, 柳子怡, 付志强, 康嘉杰, 朱丽娜, 佘丁顺
Tribological Behavior of TiN Coatings Deposited by Plasma-enhanced Magnetron Sputtering Against Aluminum
XIE Qi, LIU Ziyi, FU Zhiqiang, KANG Jiajie, ZHU Lina, SHE Dingshun
中国表面工程
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2023, (6): 68
-78
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DOI: 10.11933/j.issn.1007-9289.20221231001
