基于Cr-O-C钝化层改变多晶Cu表面能和表层位错的脱模力与脱模精度
田振岐, 杨光, 陈菊, 李波
Demolding Strength and Demolding Accuracy Based on Surface Energy and Surface Layer Dislocations of Polycrystalline Cu Changed by Cr-O-C Passivation Layers
TIAN Zhenqi, YANG Guang, CHEN Ju, LI Bo
中国表面工程
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2024, (1): 205
-215
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DOI: 10.11933/j.issn.1007-9289.20230308002
