单晶硅磨抛协同加工的分子动力学
郭磊, 郭鹏举, 刘天罡, 郭万金, 吕景祥, 靳淇超
Molecular Dynamics of the Grinding and Polishing Collaborative-processing on Monocrystalline Silicon
GUO Lei, GUO Pengju, LIU Tiangang, GUO Wanjin, Lü Jingxiang, JIN Qichao
中国表面工程
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2024, (2): 199
-210
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DOI: 10.11933/j.issn.1007-9289.20230315001
