使用电子回旋波共振等离子体源辅助中频磁控溅射沉积氧化铌薄膜
殷冀平, 吕少波, 蔺增, 巴德纯
Deposition of Niobium-oxide Thin Films Using Electron Cyclotron Wave Resonance Plasma-Ion-Source-Assisted Medium-frequency Magnetron Sputtering
YIN Jiping, Lü Shaobo, LIN Zeng, BA Dechun
中国表面工程
.
2024, (4): 273
-279
.
DOI: 10.11933/j.issn.1007-9289.20220116002
