靶电流对磁控溅射制备TiB2薄膜结构及性能的影响
冷啸, 李红轩, 吉利, 张定军
Effect of Target Current on the Structure and Properties of TiB2 Thin Films Prepared by Magnetron Sputtering
LENG Xiao, LI Hongxuan, JI Li, ZHANG Dingjun
中国表面工程
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2024, (5): 147
-157
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DOI: 10.11933/j.issn.1007-9289.20231114002
