沉积温度对AlCrTiN涂层组织结构与性能的影响∗
林静,张硕,马德政,范其香,王铁钢,曹凤婷
Effects of Deposition Temperature on the Structure and Property of AlCrTiN Coatings
LIN Jing, ZHANG Shuo, MA Dezheng, FAN Qixiang, WANG Tiegang, CAO Fengting
中国表面工程
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2021, (6): 114
-123
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DOI: 10.11933/j.issn.1007-9289.20210709001