等离子-物理气相沉积(PS-PVD)的材料输运行为与沉积机理研究进展∗
黄璐,刘梅军,杨冠军
Research Progress on Material Transportation Behavior and Deposition Mechanism of Plasma Spray-physical Vapor Deposition (PS-PVD)
HUANG Lu, LIU Meijun, YANG Guanjun
中国表面工程
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2022, (1): 10
-24
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DOI: 10.11933/j.issn.1007-9289.20210518004