对几种薄膜硬度测试方法的评定
米彦郁,胡奈赛,何家文,陈华
Evaluation of several measurements in film hardness
MI Yan-yu,HU Nai-sai,HE Jia-wen,CHEN Hua
中国表面工程 . 2002, (3): 20 -23 .