沉积气压与脉冲频率对内花键齿表面Si-DLC薄膜性能的影响
徐天杨，詹华，王亦奇，李碧晗，司彦龙，汪瑞军
Effects of Deposition Pressure and Pulse Frequency on Properties for Si-DLC Films Prepared on Surface of Internal Spline Tooth
XU Tianyang, ZHAN Hua, WANG Yiqi, LI Bihan, SI Yanlong, WANG Ruijun
中国表面工程
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2022, (2): 243
-252
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DOI: 10.11933/j.issn.1007-9289.20210902001
