高功率脉冲磁控溅射技术制备纳米级ZrO2薄膜的高耐腐蚀性
孙丽，蒋琴，张志强，李倩，廖斌，欧阳晓平
Corrosion Resistance of ZrO2 Coating Prepared by High Power Impulse Magnetron Sputtering
SUN Li, JIANG Qin, ZHANG Zhiqiang, LI Qian, LIAO Bin, OUYANG Xiaoping
中国表面工程
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2022, (3): 203
-213
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DOI: 10.11933/j.issn.1007-9289.20211107001
