同步脉冲偏压对HiPIMS技术低温沉积CrN涂层结构及性能影响*
贵宾华，周晖，张腾飞，马占吉，杨拉毛草，张延帅
Effects of Synchronized Pulsed-bias on Microstructure and Properties of CrN Coatings Prepared by HiPIMS at Low Temperature
GUI Binhua, ZHOU Hui, ZHANG Tengfei, MA Zhanji, YANG Lamaocao, ZHANG Yanshuai
中国表面工程
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2022, (3): 226
-234
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DOI: 10.11933/j.issn.1007-9289.20210924004
