镀铝衍射光栅表面有机污染物的等离子体清洗技术*
孙浩，白清顺，李玉海，张鹏，杜云龙
Plasma Cleaning Technology of Organic Pollutants on Aluminized Diffraction Grating Surface
SUN Hao, BAI Qingshun, LI Yuhai, ZHANG Peng, DU Yunlong
中国表面工程
.
2022, (3): 235
-244
.
DOI: 10.11933/j.issn.1007-9289.20211111004
