双极高功率脉冲磁控溅射技术薄膜制备研究进展*
朱祥瑞，韩明月，冯蓬勃，孙玉强，李刘合
Review of Film Preparation by Bipolar Pulsed High Power Impulse Magnetron Sputtering
ZHU Xiangrui1, HAN Mingyue1, FENG Pengbo, SUN Yuqiang, LI Liuhe
中国表面工程
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2022, (5): 10
-22
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DOI: 10.11933/j.issn.1007-9289.20220114002
