HiPIMS的放电特性及其对薄膜结构和性能的调控*
李坤，高岗，杨磊，夏菲，孙春强，滕祥青，张宇民，朱嘉琦
Discharge Characteristics of HiPIMS and Its Regulation on the Structure and Properties of Thin Films
LI Kun, GAO Gang, YANG Lei, XIA Fei, SUN Chunqiang, TENG Xiangqing, ZHANG Yumin, ZHU Jiaqi
中国表面工程
.
2022, (5): 42
-55
.
DOI: 10.11933/j.issn.1007-9289.20220115002
