高功率脉冲磁控溅射制备金属氮化物涂层
魏永强，顾艳阳，蒋志强
Application Research Progress of High Power Impulse Magnetron Sputtering in the Preparation of Metal Nitrides Coatings
WEI Yongqiang, GU Yanyang, JIANG Zhiqiang
中国表面工程
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2022, (5): 70
-92
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DOI: 10.11933/j.issn.1007-9289.20220117001
