HiPIMS沉积光电薄膜研究进展:放电特性和参数调控
张海宝，刘洋，陈强
Research Progress on Optoelectronic Thin Films Deposited by HiPIMS: Discharge Characteristics and Parameter Adjustment
ZHANG Haibao, LIU Yang, CHEN Qiang
中国表面工程
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2022, (5): 93
-104
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DOI: 10.11933/j.issn.1007-9289.20211231004
