非平衡磁控溅射沉积类石墨碳膜结构及其摩擦学性能
王永军1,2，李红轩1，吉利1，刘晓红1，吴艳霞1,2，周惠娣1，陈建敏1
Microstructure and Tribological Properties of Graphitelike Carbon Film Prepared by Unbalanced Magnetron Sputtering
WANG Yong-jun1,2, LI Hong-xuan1, JI Li1, LIU Xiao-hong1, WU Yan-xia1,2, ZHOU Hui-di1, CHEN Jian-min1
中国表面工程
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2011, (3): 17
-22
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