高引燃脉冲新HiPIMS模式对TiN/CrN多层膜结构和性能的影响
高凯晨，巩春志，徐啸尘，田修波
Effect of New HiPIMS Mode with High Ignition Pulse on Structure and Properties of TiN / CrN Multilayers
GAO Kaichen, GNOG Chunzhi, XU Xiaochen, TIAN Xiubo
中国表面工程
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2022, (5): 145
-154
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DOI: 10.11933/j.issn.1007-9289.20211231002
