电-磁场协同增强HiPIMS技术的CrAl靶放电行为及CrAlN薄膜制备
李春伟，田修波
CrAl Target Discharge Behavior of Electric and Magnetic Fields Synergistically Enhancing HiPIMS and Preparation of CrAlN Film
LI Chunwei1,2, TIAN Xiubo
中国表面工程
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2022, (5): 155
-162
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DOI: 10.11933/j.issn.1007-9289.20220115001
