筒内高功率脉冲磁控溅射放电等离子体的空间分布及输运行为
崔岁寒，李体军，李蕊，吴忠灿，马正永，吴忠振
Plasma Spatial Distribution and Transport Behavior of High Power Impulse Magnetron Sputtering in Cylindrical Cathode
CUI Suihan, LI Tijun, LI Rui, WU Zhongcan, MA Zhengyong, WU Zhongzhen
中国表面工程
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2022, (5): 163
-171
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DOI: 10.11933/j.issn.1007-9289.20220123001
