高功率脉冲反应磁控溅射CrNx涂层的放电特性与组分结构
祁宇星，周广学，左潇，都宏，陈仁德，汪爱英
Plasma Discharge Characteristics and Microstructure of CrNx Coating Deposited by Reactive HiPIMS
QI Yuxing, ZHOU Guangxue, ZUO Xiao1, DU Hong, CHEN Rende, WANG Aiying
中国表面工程
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2022, (5): 184
-191
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DOI: 10.11933/j.issn.1007-9289.20220104002
