脉冲频率对HiPIMS制备TiN薄膜组织和力学性能的影响
高海洋，张斌，魏殿忠，但敏，金凡亚
Effects of Pulse Frequency on the Microstructure and Mechanical Property of TiN Films Prepared by HiPIMS
GAO Haiyang, ZHANG Bin, WEI Dianzhong, DAN Min, JIN Fanya
中国表面工程
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2022, (5): 192
-199
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DOI: 10.11933/j.issn.1007-9289.20220103002
