HiPIMS室温溅射晶态氧化铝薄膜的粒子能量调控
高方圆，许亿，李国栋，李光，夏原
Particle Energy Regulation of Crystalline Alumina Films Sputtered at Room Temperature by HiPIMS
GAO Fangyuan, XU Yi, Li Guodong, LI Guang, XIA Yuan
中国表面工程
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2022, (5): 246
-253
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DOI: 10.11933/j.issn.1007-9289.20211230004
