双阴极等离子溅射沉积TiC薄膜对金刚石工具性能的影响*
罗雯1, 揭晓华1, 蒙云开2, 徐江3, 陶洪亮2, 魏菊2
Effects of TiC Coating Prepared by Ion Sputtering with Double Cathodes on Properties of Diamond Tools
LUO Wen1, JIE Xiaohua1, MENG Yunkai2, XU Jiang3, TAO Hongliang2, WEI Jv2
中国表面工程
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2012, (5): 26
-30
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