乙醇对低磨料CMP过程中铜膜凹凸处去除速率选择性的影响
李炎， 刘玉岭， 卜小峰， 王傲尘
Effect of Ethanol on the Rate Selectivity of Copper Film Concave Position and Convex Position in the CMP Process with Low Abrasive Concentration
LI Yan, LIU Yuling, BU Xiaofeng, WANG Aochen
中国表面工程
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2014, (2): 95
-101
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DOI: 10.3969/j.issn.1007-9289.2014.02.016
