Mo和C含量对AlCrN薄膜组织和性能的影响
施杰，陈云，刘浩，康建军，李潇阳，张丽，鲜广，杜昊
Effect of Mo and C Contents on the Crystal Structure and Properties of AlCrN Films
SHI Jie, CHEN Yun, LIU Hao, KANG Jianjun, LI Xiaoyang, ZHANG Li, XIAN Guang, DU Hao
中国表面工程
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2022, (6): 286
-296
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DOI: 10.11933/j.issn.1007-9289.20220411004
