TiAlN/Ta多层膜的力学性能及热稳定性取得新进展
商宏飞
Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition Obtains New Progress
SHANG Hongfei
中国表面工程
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2014, (6): 141
-141
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DOI: 10.11933/j.issn.1007-9289.2014.06.018
