H2/CH4流量比对含氢DLC薄膜结构及摩擦学性能的影响
吴金龙， 周晖， 郑军， 杨拉毛草， 张延帅， 胡汉军
Effects of Flow Ratio of H2 and CH4 on Structure and Friction Properties of Hydrogen Diamond-like Carbon Films
WU Jinlong, ZHOU Hui, ZHENG Jun, YANG Lamaocao, ZHANG Yanshuai, HU Hanjun
中国表面工程
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2015, (1): 42
-48
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DOI: 10.11933/j.issn.1007-9289.2015.01.007
