Effect of Conditioning Slurry on Material Removal Stability in Fixed- abrasive Chemical Mechanical Polishing of Single-crystal SiC
WU Pengfei, LIU Ning, HE Lei, ZHU Nannan, ZHU Yongwei
China Surface Engineering . 2025, (5): 301 -311 .  DOI: 10.11933/j.issn.1007-9289.20240417002

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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