Effect of Cerium Oxide Abrasives with Different Particle Sizes on the Chemical Mechanical Planarization Performance of K9 Glass
JIANG Feng, QIAN Shanhua, QU Kesong, BIAN Da, NI Zifeng
China Surface Engineering . 2025, (5): 107 -118 .  DOI: 10.11933/j.issn.1007-9289.20241226002

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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