Preparation of Hydrogenated Carbon Film with Hexagonal Diamond Structure by PECVD

CAO Zhong-yue1,2, ZHANG Bin1, WEI Li1,2, ZHANG Jun-yan1

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (4) : 55-59.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (4) : 55-59.

Preparation of Hydrogenated Carbon Film with Hexagonal Diamond Structure by PECVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(4): 55-59

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ISSN 1007-9289　CN 11-3905/TG
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