Effect of Imidazole on the Chemical Mechanical Planarization of Ruthenium

WANG Jie, CHU Xiang-feng, DONG Yong-ping, SUN Wen-qi, YE Ming-fu, BAI Lin-shan

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (3) : 25-30.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (3) : 25-30.

Effect of Imidazole on the Chemical Mechanical Planarization of Ruthenium

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(3): 25-30

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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